In the ASML factory there is a constant drive for reducing cycle time for setting up EUV scanner. In this context, it needs to be investigated if the current version of the EUV metrology calibration sequence can be reduced further. We intend to do so by creating one calibration step that will combine several calibration processes. 

Metrology combines and processes data from many different parts of the machine. Imaging, overlay, calibration, set-up and corrections for various effects. A distinction is made between the measurement side (the wafer is being measured) - and the exposure side (the wafer is being exposed). The intern will work in the Image Setup group, which does work for the exposure side. Also, interactions with EUV sensors and EUV projection will be needed. 

The calibration sequence makes use of many measurements of the aberrations produced by the projection system. The image quality calibration (IQC) team has invested time to find out if an efficient choice of measurements can reduce the number of measurements, and thus the cycle time. They have found out that this can be done by exploiting the most important behavior of the projection optics and a Design Of Experiments layout. As an intern, you will continue the ongoing investigation work, asses performances and propose alternative calibration methods, to enable faster calibration of the EUV projection optical system. Assignment is divided in three stages:

Familiarize with the calibration process of EUV machines, tooling and calibration proposal of using Principal Component Analysis.

Implement MATLAB prototype using DoE layout for EUV NXE machines with multiple KPIs optimization.

If time permits, propose DOE that can remove biases from NXE measurement system.

To be a match for this internship, you:

Are a master student in math, physics, computer science, optics, engineering (e.g. Electrical, Mechanical, Software, Control Systems).

Are rigorous, autonomous and analytical-oriented and have good understanding of linear algebra and math.

Have good knowledge of at least one: MATLAB, Python, or Julia.

Have good communication and writing skills in English;

Have good technical communication skills for different kind of audiences (from technical experts to more generic audience)

This is a Master apprentice or graduation internship for a minimum of 6 months, for 4 to 5 days per week (at least 3 days onsite). The start date of this internship is as soon as possible.

Other requirements you need to meet

You are enrolled at an educational institute for the entire duration of the internship;

You are located in the Netherlands to perform your internship. In case you are currently living/studying outside of the Netherlands, your CV/motivation letter includes the willingness to relocate;

If you are a non-EU citizen, studying in the Netherlands, your university is willing to sign the documents relevant for doing an internship (i.e., Nuffic agreement).

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion is a driving force in the success of our company.

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